Title:
容量型ガスセンサ
Document Type and Number:
Japanese Patent JP6450506
Kind Code:
B2
Abstract:
A capacitive gas sensor in which a second electrode layer made of a nano-carbon material entangled to be three-dimensionally reticulated and a gas-sensitive film are not separated from each other. A capacitive gas sensor includes a substrate; a first electrode layer formed on the substrate; a gas-sensitive film formed on the first electrode layer and having air permeability; and a second electrode layer formed on the gas-sensitive film to be opposed to the first electrode layer and made of a nano-carbon material entangled to be three-dimensionally reticulated. The capacitive gas sensor also includes a reinforcing resin layer having air permeability and disposed at least on the second electrode layer.
Inventors:
Eiji Ito
Yoshinori Yamaguchi
Tatsuya Nishida
Matsubara Kosuke
Yoshinori Yamaguchi
Tatsuya Nishida
Matsubara Kosuke
Application Number:
JP2018538478A
Publication Date:
January 16, 2019
Filing Date:
September 08, 2017
Export Citation:
Assignee:
Hokuriku Electric Industry Co., Ltd.
Shinshu University
Shinshu University
International Classes:
G01N27/22
Domestic Patent References:
| JP2013539040A | ||||
| JP599877A | ||||
| JP20157618A | ||||
| JP2016504595A | ||||
| JP2015525362A | ||||
| JP2015518158A |
Foreign References:
| US20060249402 |
Other References:
ITOH et al.,Fabrication of fast, highly sensitive all-printed capacitive humidity sensors with carbon nanotube/polyimide hybrid electrodes,Japanese Journal of Applied Physics,2016年 1月19日,55,02BB10
Attorney, Agent or Firm:
西浦 ▲嗣▼晴
High Miki Yoshiki
Tadashi Deyama
High Miki Yoshiki
Tadashi Deyama