Title:
感放射線性樹脂組成物及びレジストパターン形成方法
Document Type and Number:
Japanese Patent JP6451427
Kind Code:
B2
Inventors:
Large saki
Application Number:
JP2015051491A
Publication Date:
January 16, 2019
Filing Date:
March 13, 2015
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
G03F7/039; G03F7/20
Domestic Patent References:
| JP2011007876A | ||||
| JP2004062049A | ||||
| JP2013097274A | ||||
| JP2011107193A |
Foreign References:
| WO2003025676A1 |
Attorney, Agent or Firm:
Hajime Amano
Yoshinori Ikeda
Hiroshi Ogawa
Koji Ishida
Kazuki Kagami
Kenichi Fujinaka
Yoshinori Ikeda
Hiroshi Ogawa
Koji Ishida
Kazuki Kagami
Kenichi Fujinaka