Title:
感光性樹脂組成物
Document Type and Number:
Japanese Patent JP6459191
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a photosensitive resin composition which exhibits high sensitivity and has a low taper angle after cured.SOLUTION: A photosensitive resin composition comprises (a) a resin having a structural unit represented by the general formula (1), (b) a photosensitizer, (c) a compound comprising an alkylene oxide chain, and (d) a thermal crosslinking agent represented by the general formula (2).
Inventors:
Shingo Kuromoto
Mika Koshino
Ichito Miyoshi
Mika Koshino
Ichito Miyoshi
Application Number:
JP2014055952A
Publication Date:
January 30, 2019
Filing Date:
March 19, 2014
Export Citation:
Assignee:
TORAY INDUSTRIES,INC.
International Classes:
G03F7/004; G03F7/023; G03F7/037; H01L51/50; H05B33/10; H05B33/12; H05B33/22
Domestic Patent References:
| JP2011204515A | ||||
| JP2006047377A | ||||
| JP2007264028A | ||||
| JP2011180472A |
Foreign References:
| WO2011030744A1 | ||||
| WO2009081950A1 | ||||
| WO2010001780A1 | ||||
| WO2008123053A1 | ||||
| US20100099043 |