Title:
ペリクル枠およびペリクル枠の製造方法
Document Type and Number:
Japanese Patent JP6460778
Kind Code:
B2
Inventors:
Yukihiro Kimura
Takahisa Komatsu
Takahisa Komatsu
Application Number:
JP2014261594A
Publication Date:
January 30, 2019
Filing Date:
December 25, 2014
Export Citation:
Assignee:
Nippon Special Ceramics Co., Ltd.
International Classes:
G03F1/64
Domestic Patent References:
| JP7248615A | ||||
| JP2001249442A | ||||
| JP2001181054A | ||||
| JP2011007934A | ||||
| JP2005070191A | ||||
| JP2006515932A | ||||
| JP2001228600A | ||||
| JP2011168420A | ||||
| JP2006210546A |
Foreign References:
| WO2010029997A1 | ||||
| US6264773 |
Attorney, Agent or Firm:
Meisei International Patent Office