Title:
光学式表面検査装置及び光学式表面検査方法
Document Type and Number:
Japanese Patent JP6463246
Kind Code:
B2
Inventors:
Ayumu Ishihara
Fukawa
Fukawa
Application Number:
JP2015194175A
Publication Date:
January 30, 2019
Filing Date:
September 30, 2015
Export Citation:
Assignee:
Hitachi High-Tech Fine Systems Co., Ltd.
International Classes:
G01B11/30; G01B11/24; G01N21/88; G01N21/95
Domestic Patent References:
| JP2013210232A | ||||
| JP2011137721A | ||||
| JP2011096305A | ||||
| JP2009162570A | ||||
| JP2001174415A | ||||
| JP2002257742A | ||||
| JP2002333313A | ||||
| JP2003004654A |
Foreign References:
| US7295300 |
Attorney, Agent or Firm:
Kozo Takahashi