Title:
ジャイロ素子、ジャイロセンサー、電子機器、および移動体
Document Type and Number:
Japanese Patent JP6464667
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a gyro element that can suppress increase in a CI (crystal impedance) value of a drive vibration arm while maintaining a tuning amount in an adjustment vibration arm.SOLUTION: A gyro element 300 includes: drive vibration arms 2a, 2b extending from a base 1; detection vibration arms 3a, 3b extending from the base in an opposite direction to the extension direction of the drive vibration arms via the base; and adjustment vibration arms 4a, 4b disposed to interpose the detection vibration arms in a plan view. A detuning degree, which is a value obtained by dividing a difference between a vibration frequency of the drive vibration arm and a vibration frequency of the adjustment vibration arm by the vibration frequency of the drive vibration arm, satisfies 0.58×(L/t)≥(detuning degree)≥0.12×(L/t), where L represents a distance between a first connection part Q1 of the drive vibration arm to the base and a second connection part Q2 of the adjustment vibration arm to the base; and t represents a thickness of the base.SELECTED DRAWING: Figure 2
Inventors:
Hiroshi Nakagawa
Application Number:
JP2014221153A
Publication Date:
February 06, 2019
Filing Date:
October 30, 2014
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01C19/5628; H01L41/083
Domestic Patent References:
| JP2013186029A | ||||
| JP2013205328A | ||||
| JP2013253895A | ||||
| JP11230758A |
Foreign References:
| US20130255387 |
Attorney, Agent or Firm:
Kazuaki Watanabe
Mitsuhiro Isobe
Satoshi Nakai
Hiroki Matsuoka
Mitsuhiro Isobe
Satoshi Nakai
Hiroki Matsuoka
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