Title:
加工装置
Document Type and Number:
Japanese Patent JP6465722
Kind Code:
B2
Abstract:
The purpose of the present invention is to provide a processing device capable of keeping the accuracy of recognizing a processing defect high. The processing device (2) comprises: a chuck table (14); a processing means (18); an X-axis moving means for relatively moving the chuck table and the processing means in the direction of the X-axis; a Y-axis moving means (22) for relatively moving the chuck table and the processing means in the direction of the Y-axis intersecting with the X-axis at right angles; a photographing means (44); a setting input means (50) for setting a photographing position and photographing conditions depending on the characteristics of a division-scheduled line during photographing of the division-scheduled line (13) using the photographing means, and image processing conditions during processing of an image obtained by photographing the division-scheduled line; and a memory means (48a) for memorizing the position of the division-scheduled line, the photographing position and the photographing conditions set with respect to the division-scheduled line, and the image processing conditions. Processing traces (21) formed on the division-scheduled line are photographed by using the photographing position and the photographing conditions corresponding to the division-scheduled line and an obtained image is processed by using the image processing conditions.
Inventors:
Naoya Tokuman
Application Number:
JP2015078032A
Publication Date:
February 06, 2019
Filing Date:
April 06, 2015
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B24B27/06; B24B49/12; H01L21/68
Domestic Patent References:
| JP2008004806A | ||||
| JP2011012971A | ||||
| JP2008131015A | ||||
| JP2009246015A | ||||
| JP2001298000A | ||||
| JP7130806A |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Tomohiro Okamoto