Title:
ダイボンダおよびボンディング方法
Document Type and Number:
Japanese Patent JP6470054
Kind Code:
B2
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Inventors:
Yuji Odamine
Application Number:
JP2015011925A
Publication Date:
February 13, 2019
Filing Date:
January 26, 2015
Export Citation:
Assignee:
Fasford Technology Co., Ltd.
International Classes:
H01L21/52
Domestic Patent References:
| JP2004311938A | ||||
| JP2008270278A | ||||
| JP2014179561A | ||||
| JP2006324599A | ||||
| JP2014175546A |
Attorney, Agent or Firm:
Polaire Patent Business Corporation