Title:
フレームユニット
Document Type and Number:
Japanese Patent JP6474233
Kind Code:
B2
Inventors:
Naoko Yamamoto
Bang Hyun Jin
Lee
Toshifumi Matsuyama
Bang Hyun Jin
Lee
Toshifumi Matsuyama
Application Number:
JP2014225560A
Publication Date:
February 27, 2019
Filing Date:
November 05, 2014
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B24B27/06; B24B53/00
Domestic Patent References:
| JP2005251909A | ||||
| JP2004058221A | ||||
| JP2013188814A | ||||
| JP2006312217A |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Tomohiro Okamoto