Title:
静電チャック
Document Type and Number:
Japanese Patent JP6475032
Kind Code:
B2
Inventors:
Miwa Kaname
Yasuhiko Inui
Naoya Uemura
Nagahara Mitsuyuki
Mizuta tree
Yasuhiko Inui
Naoya Uemura
Nagahara Mitsuyuki
Mizuta tree
Application Number:
JP2015019330A
Publication Date:
February 27, 2019
Filing Date:
February 03, 2015
Export Citation:
Assignee:
Nippon Special Ceramics Co., Ltd.
International Classes:
H01L21/683; H02N13/00
Domestic Patent References:
| JP2010123862A | ||||
| JP11220008A | ||||
| JP6279137A | ||||
| JP2003249598A | ||||
| JP2001044326A |
Attorney, Agent or Firm:
Nagoya International Patent Service Corporation