Title:
縦型MOSFETおよび縦型MOSFETの製造方法
Document Type and Number:
Japanese Patent JP6476821
Kind Code:
B2
Inventors:
Katsunori Ueno
Application Number:
JP2014253803A
Publication Date:
March 06, 2019
Filing Date:
December 16, 2014
Export Citation:
Assignee:
Fuji Electric Co., Ltd.
International Classes:
H01L29/78; H01L21/336; H01L29/06; H01L29/12
Domestic Patent References:
| JP2009076681A | ||||
| JP2008098536A | ||||
| JP8097413A | ||||
| JP2009182271A | ||||
| JP2012235001A | ||||
| JP2006066439A |
Attorney, Agent or Firm:
Longhua International Patent Service Corporation
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