算出装置及び方法、プログラム、並びに露光方法

Title:

算出装置及び方法、プログラム、並びに露光方法

Document Type and Number:

Japanese Patent JP6477850

Kind Code:

B2

More Like This:

JP2009242756	PHOTOSENSITIVE RESIN COMPOSITION, POLYMER COMPOUND, METHOD FOR PRODUCING PATTERN, AND ELECTRONIC DEVICE
JPH0344025	APPARATUS FOR HARDENING WITH ULTRAVIOLET RAYS
JP5590062	A liquid immersion member, a liquid immersion exposure device, a liquid immersion exposure method, and a device manufacturing method

Inventors:

Koujou Koichi
Taro Ogata
Toru Hirayama

Application Number:

JP2017240414A

Publication Date:

March 06, 2019

Filing Date:

December 15, 2017

Export Citation:

Assignee:

NIKON CORPORATION

International Classes:

G03F7/20

Domestic Patent References:

Attorney, Agent or Firm:

Satoshi Omori

Previous Patent: 予混合圧縮着火式エンジン

Next Patent: VARIABLE WAVELENGTH RADIATION LIGHT SOURCE