Title:
光走査アクチュエータの評価装置
Document Type and Number:
Japanese Patent JP6480784
Kind Code:
B2
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Inventors:
Tetsuo Ogino
Application Number:
JP2015076066A
Publication Date:
March 13, 2019
Filing Date:
April 02, 2015
Export Citation:
Assignee:
Nippon Signal Co., Ltd.
International Classes:
G02B26/10; B81B3/00; G01M11/00; G02B26/08
Domestic Patent References:
| JP2005321484A | ||||
| JP2007183264A | ||||
| JP2012093577A | ||||
| JP2004302104A | ||||
| JP2008082873A | ||||
| JP2003131151A | ||||
| JP2011174967A | ||||
| JP2009276491A | ||||
| JP2012141265A | ||||
| JP2010002636A | ||||
| JP2009109305A | ||||
| JP2006048054A |
Foreign References:
| WO2012101782A1 | ||||
| US20070041068 |
Attorney, Agent or Firm:
Moriaki Ogawa
Haruyuki Nishiyama
Shoichi Okuyama
Haruyuki Nishiyama
Shoichi Okuyama