Title:
レーザアニール装置及びレーザアニール方法
Document Type and Number:
Japanese Patent JP6482421
Kind Code:
B2
Inventors:
Naoki Wakabayashi
Man Masashi
Yasuhiro Okada
Suzuki Goomi
Man Masashi
Yasuhiro Okada
Suzuki Goomi
Application Number:
JP2015140997A
Publication Date:
March 13, 2019
Filing Date:
July 15, 2015
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
H01L21/268; H01L21/265
Domestic Patent References:
| JP2014192277A | ||||
| JP2008211136A | ||||
| JP50017415A |
Attorney, Agent or Firm:
Mikio Kuruyama
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