Title:
試料物質を検査するためのマイクロチャンバ及び検査方法
Document Type and Number:
Japanese Patent JP6483063
Kind Code:
B2
Abstract:
The invention relates to a micro-chamber for inspecting sample material, the sample material immersed in a liquid when filling the micro-chamber, the micro-chamber comprising:
¢ an inspection volume (101) for holding the sample material, the inspection volume defined by:
o a first rigid layer (102A+102B),
o a second rigid layer (103A+103B) spaced from the first rigid layer, and
o a hermetic seal (104) between the first and the second rigid layers,
Characterized in that,
prior to filling the inspection chamber with the liquid with immersed sample material,
¢ a thin part (105) of at least one of the rigid layers separates the inspection volume from the outside,
¢ the thin part is equipped to be punctured, and
¢ the inspection volume is an evacuated volume,
as a result of which the liquid with immersed sample material, when placed upon the thin part, is sucked into the inspection volume when the thin part is punctured. This results in a micro-chamber that can be filled with sample material without the need of applying vacuum tubing's to it.
Inventors:
Luigi Mele
Prawn donor
Herald Nicolas Anne Fanfine
Prawn donor
Herald Nicolas Anne Fanfine
Application Number:
JP2016145024A
Publication Date:
March 13, 2019
Filing Date:
July 25, 2016
Export Citation:
Assignee:
FEI COMPANY
International Classes:
G01N1/28; G01N37/00; G02B21/34; H01J37/20
Domestic Patent References:
| JP2006053064A | ||||
| JP2012508879A |
Foreign References:
| US20080179518 | ||||
| US5344611 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Shinsuke Onuki
Tadahiko Ito
Shinsuke Onuki