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Patent Searching and Data


Title:
MEMSマイクロフォンと圧力センサの集積構造及びその製造方法
Document Type and Number:
Japanese Patent JP6484343
Kind Code:
B2
Inventors:
スン ヤンメイ
Application Number:
JP2017539537A
Publication Date:
March 13, 2019
Filing Date:
December 14, 2015
Export Citation:
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Assignee:
ゴルテック.インク
International Classes:
H04R31/00; H01L29/84; H04R19/04
Domestic Patent References:
JP2011176534A
Foreign References:
CN102158787A
Attorney, Agent or Firm:
中島 淳
加藤 和詳