Title:
形状計測システム及び形状計測方法
Document Type and Number:
Japanese Patent JP6486845
Kind Code:
B2
Inventors:
Keisuke Fujimoto
Kenjiro Takaya
Takanori Saito
Rikiya Ozawa
Kazuyuki Hasegawa
Kenjiro Takaya
Takanori Saito
Rikiya Ozawa
Kazuyuki Hasegawa
Application Number:
JP2016027317A
Publication Date:
March 20, 2019
Filing Date:
February 16, 2016
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G01B21/20; G01B11/24
Domestic Patent References:
| JP2001074453A | ||||
| JP2012141235A1 | ||||
| JP2015206654A |
Foreign References:
| WO2014033823A1 | ||||
| US20140225988 |
Attorney, Agent or Firm:
Fujio Patent Office