Title:
平面分光干渉計
Document Type and Number:
Japanese Patent JP6511263
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To allow a device of a simple configuration to quickly acquire an observation result by an interferometer and an observation result by a spectrometer in the same observation area.SOLUTION: A planar spectroscopic interferometer 100 is configured to arrange an interference measurement unit 20A and a spectroscopic measurement unit 20B on an irradiation optical axis O of a measured object S. The interference measurement unit 20A and the spectroscopic measurement unit 20B are configured to simultaneously observe the measured object S. Surface shape information processing means 31 is configured to acquire a three-dimensional distribution image 55 by an image from an interference detector 5, and spectroscopic information processing means 32 is configured to acquire a spectroscopic information image 56 by an image from a spectroscopic detector 13. Display control means 34 is configured to comprise three-dimensional information storage means 35, spectroscopic information storage means 36, three-dimensional display means 37, and spectroscopic information display means 38. Only specification of one point of the three-dimensional distribution image 55 displayed on display means 40 by input means 50 allows the spectroscopic information image 56 at a coordinate to be quickly and simply acquired and displayed.SELECTED DRAWING: Figure 1
Inventors:
Hisashi Akiyama
Application Number:
JP2014258248A
Publication Date:
May 15, 2019
Filing Date:
December 22, 2014
Export Citation:
Assignee:
Topcon Techno House Co., Ltd.
International Classes:
G01J3/45; G01B9/02
Domestic Patent References:
| JP2009293925A | ||||
| JP2002345760A | ||||
| JP8128899A |
Foreign References:
| WO2014126778A2 | ||||
| US20120188538 | ||||
| US20090021724 |
Other References:
北川克一 ほか,多波長ワンショット干渉計測技術の開発と実用化,精密工学会誌,2012年,Vol. 78, No. 2,pp. 112-116
Attorney, Agent or Firm:
Takaaki Kimura
Masafumi Miyao
Masafumi Miyao