Title:
基板処理装置
Document Type and Number:
Japanese Patent JP6512426
Kind Code:
B2
Inventors:
Naoyuki Osada
Nakagawa Hitoshi
Nakagawa Hitoshi
Application Number:
JP2015005933A
Publication Date:
May 15, 2019
Filing Date:
January 15, 2015
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/304; F16K31/04; H01L21/027; H01L21/306
Domestic Patent References:
| JP2008008415A | ||||
| JP6051843A | ||||
| JP6051842A | ||||
| JP2005155878A | ||||
| JP2010123709A |
Foreign References:
| WO1997016105A1 |
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Masahide Yasuda
Mio Kawasaki
Masahide Yasuda