Title:
有機ＥＬデバイスの製造方法および成膜装置
Document Type and Number:
Japanese Patent JP6515224
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for manufacturing an organic EL device having a thin film sealing structure with improved mass productivity and moisture resistance reliability, and a depositing device used in the manufacturing method.SOLUTION: A method for manufacturing an organic EL device includes a step of preparing a substrate and an element substrate including a plurality of organic EL devices arranged on the substrate, and a step of forming a thin film sealing structure on the element substrate. The step of forming the thin film sealing structure further includes the steps of: forming a first inorganic barrier layer on the element substrate; condensing a photocurable resin on the first inorganic barrier layer; forming a photocurable resin layer by irradiating a plurality of regions in which the photocurable resin is selected with a laser beam and curing at least a part of the photocurable resin; removing an uncured portion of the photocurable resin; and forming a second inorganic barrier layer covering the photocurable resin layer on the first inorganic barrier layer.SELECTED DRAWING: Figure 1A
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Inventors:
Katsuhiko Kishimoto
Application Number:
JP2018038787A
Publication Date:
May 15, 2019
Filing Date:
March 05, 2018
Export Citation:
Assignee:
Sakai Display Products Co., Ltd.
International Classes:
H05B33/10; G09F9/30; H01L27/32; H01L51/50; H05B33/02; H05B33/04; H05B33/06
Domestic Patent References:
| JP2003347045A | ||||
| JP2013187190A | ||||
| JP2016039120A | ||||
| JP2010171012A | ||||
| JP3061346A1 | ||||
| JP2006004650A | ||||
| JP2015056335A | ||||
| JP2005157141A |
Foreign References:
| WO2014196137A1 |
Attorney, Agent or Firm:
Seiji Okuda
Osamu Kita
Ryoji Yamashita
Akiko Miyake
Murase Nariyasu
Rinko Kita
Osamu Kita
Ryoji Yamashita
Akiko Miyake
Murase Nariyasu
Rinko Kita