Title:
光維持プラズマを形成するための開放プラズマランプ
Document Type and Number:
Japanese Patent JP6517231
Kind Code:
B2
Abstract:
An open plasma lamp includes a cavity section. A gas input and gas output of the cavity section are arranged to flow gas through the cavity section. The plasma lamp also includes a gas supply assembly fluidically coupled to the gas input of the cavity section and configured to supply gas to an internal volume of the cavity section. The plasma lamp also includes a nozzle assembly fluidically coupled to the gas output of the cavity section. The nozzle assembly and cavity section are arranged such that a volume of the gas receives pumping illumination from a pump source, where a sustained plasma emits broadband radiation. The nozzle assembly is configured to establish a convective gas flow from within the cavity section to a region external to the cavity section such that a portion of the sustained plasma is removed from the cavity section by the gas flow.
Inventors:
Wilson Lauren
Chimalgi Anant
Bezel Ilya
Shemerinin Anatoly
Dorsten Mathieu
Delgado Guildard
Chimalgi Anant
Bezel Ilya
Shemerinin Anatoly
Dorsten Mathieu
Delgado Guildard
Application Number:
JP2016559165A
Publication Date:
May 22, 2019
Filing Date:
March 27, 2015
Export Citation:
Assignee:
KLA-Tenker Corporation
International Classes:
H01J65/04; H01J61/24; H01J61/30; H01J61/32; H01J61/52; H05H1/24
Domestic Patent References:
| JP2009532829A | ||||
| JP2010157443A | ||||
| JP6410794B2 |
Foreign References:
| US20130003384 | ||||
| US20130106275 |
Attorney, Agent or Firm:
Patent Corporation yki International Patent Office