Title:
金属パターンの製造方法
Document Type and Number:
Japanese Patent JP6519364
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To suppress corrosion of a metal material in a manufacturing method of a metal pattern having an etching step using a halogen gas.SOLUTION: The manufacturing method comprises preparing an etching target film 11 having a mask 2 formed on its upper surface, an etching step of performing dry etching on the etching target film 11 using a halogen gas in a state where the etching target film 11 is covered with the mask 2, an after corrosion treatment step of removing a surface layer 21 of the mask 2 from which the components of the halogen gas remain by using gas so that the mask 2 remains after the etching step, and a step of removing the mask 2 in a state where the halogen gas is removed from the atmosphere after the after corrosion treatment step.SELECTED DRAWING: Figure 2
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Inventors:
Kiyonaga Taishi
Application Number:
JP2015135271A
Publication Date:
May 29, 2019
Filing Date:
July 06, 2015
Export Citation:
Assignee:
株式会社デンソー
International Classes:
H01L21/3065; C23F4/00; H01L21/28; H01L21/3213; H01L21/768; H01L43/12
Domestic Patent References:
| JP5165225A | ||||
| JP2001085412A | ||||
| JP2005072491A | ||||
| JP8111396A | ||||
| JP2002289588A | ||||
| JP2008065944A | ||||
| JP10189550A |
Attorney, Agent or Firm:
Patent Business Corporation Yuai Patent Office