Title:
プラズマ処理装置およびプラズマ処理方法
Document Type and Number:
Japanese Patent JP6524566
Kind Code:
B2
Inventors:
Shogo Okita
Bunji Mizuno
Tomohiro Okumura
Bunji Mizuno
Tomohiro Okumura
Application Number:
JP2018019758A
Publication Date:
June 05, 2019
Filing Date:
February 07, 2018
Export Citation:
Assignee:
Panasonic IP Management Co., Ltd.
International Classes:
H01L21/3065; H01L21/683
Domestic Patent References:
| JP2014063810A | ||||
| JP2002141337A | ||||
| JP2001053030A | ||||
| JP2010021464A | ||||
| JP2011228567A | ||||
| JP2010103431A |
Attorney, Agent or Firm:
Kawasaki/Hashimoto Patent Office