Title:
圧力センサ
Document Type and Number:
Japanese Patent JP6528745
Kind Code:
B2
Abstract:
A pressure sensor detects a pressure of a pressure transmitting medium. The pressure sensor includes a sensor substrate and a protection film. The sensor substrate includes a recess recessed relative to a periphery thereof and a thin portion thinner than the periphery due to the recess. The protection film is provided on a bottom surface of the recess that is one side of the thin portion and a part of a lateral surface of the recess, and the protection film suppresses an adhesion of a contamination contained in the pressure transmitting medium. The pressure sensor includes an adhesion suppressing portion that includes an uneven section formed in at least a part of the lateral surface, and a liquid repellent film repellent to liquid in the pressure transmitting medium and provided as the protection film on the uneven section to exhibit a lotus effect.
Inventors:
Shinji Kawano
Kazuaki Madawa
Kazuaki Madawa
Application Number:
JP2016173921A
Publication Date:
June 12, 2019
Filing Date:
September 06, 2016
Export Citation:
Assignee:
株式会社デンソー
International Classes:
G01L19/06; G01L9/00
Domestic Patent References:
| JP2016142674A | ||||
| JP2016118494A | ||||
| JP2015197367A |
Foreign References:
| WO2009090851A1 | ||||
| US7216547 |
Attorney, Agent or Firm:
Kazuyuki Yahagi
Taihei Nonobe
Takanori Kubo
Taihei Nonobe
Takanori Kubo