Title:
プローブユニットおよびプローブユニット製造方法
Document Type and Number:
Japanese Patent JP6534558
Kind Code:
B2
Inventors:
Masashi Kobayashi
Application Number:
JP2015085657A
Publication Date:
June 26, 2019
Filing Date:
April 20, 2015
Export Citation:
Assignee:
Hioki Electric Co., Ltd.
International Classes:
G01R1/06; G01R1/073; H01L21/66
Domestic Patent References:
| JP1124576U | ||||
| JP2007163288A | ||||
| JP10160760A | ||||
| JP2004156993A | ||||
| JP2006330006A | ||||
| JP2000131340A | ||||
| JP200826027A |
Foreign References:
| US20130082729 |
Attorney, Agent or Firm:
Shinji Sakai