Title:
圧電薄膜共振器、フィルタ、デュプレクサ、及び圧電薄膜共振器の製造方法
Document Type and Number:
Japanese Patent JP6535637
Kind Code:
B2
Abstract:
A piezoelectric thin film resonator includes: a substrate; a piezoelectric film located on the substrate, the piezoelectric film including an aluminum nitride film containing a II-group or XII-group element and a IV-group or V-group element, a concentration of the IV-group or V-group element being higher than a concentration of the II-group or XII-group element in a middle region in a thickness direction, the concentration of the II-group or XII-group element being higher than the concentration of the IV-group or V-group element in at least one of end regions in the thickness direction; and a lower electrode and an upper electrode facing each other across the piezoelectric film.
Inventors:
Yokoyama Go
Tokihiro Nishihara
Tokihiro Nishihara
Application Number:
JP2016143660A
Publication Date:
June 26, 2019
Filing Date:
July 21, 2016
Export Citation:
Assignee:
TAIYO YUDEN CO.,LTD.
International Classes:
H03H9/17; H03H3/02
Domestic Patent References:
| JP2013128267A | ||||
| JP2013219743A | ||||
| JP2014121025A | ||||
| JP2015054986A | ||||
| JP2015233042A |
Foreign References:
| WO2015080023A1 |
Attorney, Agent or Firm:
Shuhei Katayama