Title:
質量分析計、その使用、およびガス混合物の質量分析検査の方法
Document Type and Number:
Japanese Patent JP6535660
Kind Code:
B2
Abstract:
The disclosure relates to a mass spectrometer for mass spectrometric examination of gas mixtures, including: an ionization device and an ion trap for storage and mass spectrometric examination of the gas mixture. In one aspect of the disclosure, the ionization device is embodied for supplying ions and/or metastable particles of an ionization gas and/or for supplying electrons to the ion trap for ionizing the gas mixture to be examined and the mass spectrometer is embodied to determine the number of ions and/or metastable particles of the ionization gas present in the ion trap and/or the number of ions of a residual gas present in the ion trap prior to examining the gas mixture. The disclosure also relates to the use of such a mass spectrometer and a method for mass spectrometric examination of a gas mixture.
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Inventors:
Fedsenco Genergy
Ariman Michel
Chun Hin Yi Anthony
Rank albrecht
Gorcovel Leonito
Ariman Michel
Chun Hin Yi Anthony
Rank albrecht
Gorcovel Leonito
Application Number:
JP2016524707A
Publication Date:
June 26, 2019
Filing Date:
February 20, 2014
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
G01N27/62; H01J49/42
Domestic Patent References:
| JP2009508307A | ||||
| JP2012099487A | ||||
| JP2012098293A | ||||
| JP2011038797A | ||||
| JP2012501072A | ||||
| JP2008507108A | ||||
| JP2011138650A | ||||
| JP2012526362A |
Foreign References:
| US20070224697 |
Attorney, Agent or Firm:
Takaki Nishijima
Disciple Maru Ken
Shinichiro Tanaka
Fumiaki Otsuka
Hiroyuki Suda
Naoki Kondo
Disciple Maru Ken
Shinichiro Tanaka
Fumiaki Otsuka
Hiroyuki Suda
Naoki Kondo