Title:
積層構造中のレイヤを有するアブソリュート型位置エンコーダ用スケール
Document Type and Number:
Japanese Patent JP6537931
Kind Code:
B2
Abstract:
An absolute position encoder scale includes first and second layers in a stacked configuration. A read head moves relative to spatial modulation patterns of first (top) and second (lower) signal layers along a measuring axis, and a sensing portion produces one or more scale sensing fields to sense the signal layers. A higher frequency scale sensing field may provide a first limited sensing depth to sense position relative to the top signal layer pattern, and a lower frequency field may provide a second deeper sensing depth to sense position relative to the lower signal layer pattern. In some embodiments, an isolation layer between the first and second layers may include a spatial modulation pattern that complements the first layer pattern, to nullify its signal effects when sensing position relative to the second layer pattern using the second sensing depth.
Inventors:
Ted Staton Cook
Application Number:
JP2015163451A
Publication Date:
July 03, 2019
Filing Date:
August 21, 2015
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01D5/245; G01B7/00
Domestic Patent References:
| JP2001108484A | ||||
| JP2012515914A | ||||
| JP2001255108A | ||||
| JP6372502U | ||||
| JP11230706A |
Foreign References:
| US20090119940 | ||||
| US20060103376 |
Attorney, Agent or Firm:
Ken Ieiri