Title:
ツール内ＥＳＤ事象監視方法および装置
Document Type and Number:
Japanese Patent JP6538566
Kind Code:
B2
Abstract:
In one embodiment of the invention, an apparatus for electrostatic discharges (ESD) events monitoring incorporating a charged device model event simulator (CDMES) unit comprises: at least one antenna positioned in a process area; an ESD detector coupled to said at least one antenna; said ESD detector wirelessly coupled to said CDMES unit; and said ESD detector calibrated for different discharge energies generated by said CDMES unit.
Inventors:
Lyle Dee. Nelsen
Stephen B. Hayman
Mark E. Hog Set
Stephen B. Hayman
Mark E. Hog Set
Application Number:
JP2015550807A
Publication Date:
July 03, 2019
Filing Date:
December 27, 2013
Export Citation:
Assignee:
Illinois Tours Works Inc.
International Classes:
G01R29/00; G01R35/00
Domestic Patent References:
| JP2009507245A | ||||
| JP201043992A | ||||
| JP2010117352A | ||||
| JP200328921A |
Foreign References:
| US20070164747 |
Attorney, Agent or Firm:
Atsushi Aoki
Tetsuro Shimada
Shinji Mitsuhashi
Yasushi Ohashi
Koichi Ito
Takuya Shinoda
Tetsuro Shimada
Shinji Mitsuhashi
Yasushi Ohashi
Koichi Ito
Takuya Shinoda