Title:
荷電粒子線装置及び試料昇降装置
Document Type and Number:
Japanese Patent JP6539109
Kind Code:
B2
Abstract:
To realize a sample lifting and lowering device capable of easily responding to increase of a diameter of a sample with light weight and high rigidity as well as with less directional dependence of rigidity as the sample lifting lowering device arranged above a horizontal movement mechanism. The sample lifting and lowering device includes first and second lifting and lowering mechanisms that lift and lower a sample stage to which the sample is fixed, first and second driving devices that drive the first and second lifting and lowering mechanisms to be lifted and lowered individually and a controller that synchronizes lifting/lowering operations of the first and second lifting and lowering mechanisms by the first and second driving devices by first and second control signals, in which the first lifting and lowering mechanism includes a first deceleration mechanism generating a first drive output obtained by decelerating a first drive input given from the first driving device in a direction different from a direction of the input, the second lifting and lowering mechanism includes a second deceleration mechanism generating a second drive output obtained by decelerating a second drive input given from the second driving device in a direction different from a direction of the input, and directions of the first and second drive inputs are different from each other as well as are not on the same straight line.
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Inventors:
Masakazu Sugaya
Yusuke Moriwaki
Koichi Terada
Nobuo Shibata
Hiroki Ogawa
Hiroyuki Tachibana
Toshihiko Shimizu
Shuichi Nakagawa
Yusuke Moriwaki
Koichi Terada
Nobuo Shibata
Hiroki Ogawa
Hiroyuki Tachibana
Toshihiko Shimizu
Shuichi Nakagawa
Application Number:
JP2015100942A
Publication Date:
July 03, 2019
Filing Date:
May 18, 2015
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01J37/20
Domestic Patent References:
| JP2012182467A | ||||
| JP2009200147A | ||||
| JP2001351839A |
Attorney, Agent or Firm:
Yusuke Hiraki
Sekiya Mitsuo
Toshiaki Watanabe
Sekiya Mitsuo
Toshiaki Watanabe