Title:
基板収納容器
Document Type and Number:
Japanese Patent JP6539355
Kind Code:
B2
Abstract:
A sealing member of this substrate housing container has: a base part-side deformation part that couples the base part and the container contact tip part and is elastically deformable to allow the container contact tip part to oscillate relative to the base part; and a protruding part that is present in the portion of the container contact tip part connected to the base part-side deformation part and that protrudes from the outer surface of the container contact tip part. The thickness of the container contact tip part in the oscillating direction of the container contact tip part is configured to be greater than the thickness of the base part-side deformation part.
Inventors:
Narita Yuya
Application Number:
JP2017552602A
Publication Date:
July 03, 2019
Filing Date:
November 26, 2015
Export Citation:
Assignee:
Miraial Co., Ltd.
International Classes:
H01L21/673; B65D85/30
Domestic Patent References:
| JP2005256958A | ||||
| JP2013118278A | ||||
| JP2007062804A | ||||
| JP2002068364A | ||||
| JP2005508809A |
Attorney, Agent or Firm:
Masayuki Masabayashi
Hayashi Ichiyoshi
Iwaike Mitsuru
Hayashi Ichiyoshi
Iwaike Mitsuru