Title:
結晶性積層構造体の製造方法および半導体装置
Document Type and Number:
Japanese Patent JP6539906
Kind Code:
B2
Inventors:
Shinya Oda
Akio Takatsuka
Torami Tora
Akio Takatsuka
Torami Tora
Application Number:
JP2014195871A
Publication Date:
July 10, 2019
Filing Date:
September 25, 2014
Export Citation:
Assignee:
Flosfia Co., Ltd.
International Classes:
C30B29/16; H01B5/14; H01B13/00
Domestic Patent References:
| JP5397794B1 | ||||
| JP2013028480A |