Title:
振動型駆動装置
Document Type and Number:
Japanese Patent JP6541448
Kind Code:
B2
Abstract:
The vibration actuator enables easy inspection of conductivity of a conduction path for connecting an electrode of an electromechanical energy conversion element to a GND potential. In the vibration actuator, a vibration element includes an elastic body formed of a material which is insulating, dielectric, or semi-conductive, and a piezoelectric element joined to the elastic body. The piezoelectric element includes a first electrode formed on a surface of a piezoelectric body by which surface the piezoelectric body is joined to the elastic body, a second electrode provided in a manner opposed to the first electrode via the piezoelectric body, and at least two conduction paths each having a conductor in a through-hole formed in the piezoelectric body. One of the at least two conduction paths electrically connects the first electrode and the second electrode.
Inventors:
Arimitsu Anrin
Application Number:
JP2015114696A
Publication Date:
July 10, 2019
Filing Date:
June 05, 2015
Export Citation:
Assignee:
Canon Inc
International Classes:
H02N2/12; H01L41/047; H01L41/053; H01L41/09
Domestic Patent References:
| JP4021371A | ||||
| JP9285151A | ||||
| JP11252956A | ||||
| JP2005223968A |
Attorney, Agent or Firm:
Another role Shigehisa