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Title:
検査方法および検査装置
Document Type and Number:
Japanese Patent JP6543070
Kind Code:
B2
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Inventors:
Takafumi Inoue
Nobutaka Kikuiri
Akiyama Hiroteru
Application Number:
JP2015075259A
Publication Date:
July 10, 2019
Filing Date:
April 01, 2015
Export Citation:
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Assignee:
New Flare Technology Co., Ltd.
International Classes:
G01N21/956; G01B11/30; G03F1/84; G03F7/20; H01L21/66
Domestic Patent References:
JP2010112766A
JP2004239728A
JP2004079593A
JP2003215060A
JP2004101654A
JP2012173072A
JP2011221499A
JP2009229218A
JP2003035680A
JP2009002743A
Foreign References:
US7295695
Attorney, Agent or Firm:
Tetsuma Ikegami
Akira Sudo
Mitsuyuki Matsuyama



 
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