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Patent Searching and Data


Title:
ウエーハの乾燥方法及び加工装置
Document Type and Number:
Japanese Patent JP6545518
Kind Code:
B2
Inventors:
小清水 秀輝
荒谷 侑里香
Application Number:
JP2015090725A
Publication Date:
July 17, 2019
Filing Date:
April 27, 2015
Export Citation:
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Assignee:
株式会社ディスコ
International Classes:
H01L21/304; B24B7/22
Domestic Patent References:
JP2013258203A
JP2006066579A
JP2008124429A
Attorney, Agent or Firm:
酒井 宏明