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Patent Searching and Data


Title:
プラズマ生成装置、プラズマ生成方法およびプラズマ処理方法
Document Type and Number:
Japanese Patent JP6554055
Kind Code:
B2
Inventors:
高野 信彦
岩田 充
Application Number:
JP2016056645A
Publication Date:
July 31, 2019
Filing Date:
March 22, 2016
Export Citation:
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Assignee:
富士フイルム株式会社
International Classes:
H05H1/46; C23C16/509; H01L21/3065
Domestic Patent References:
JP58145100A
JP2007067441A
JP64016277A
JP11087271A
JP2006040810A
JP2009231692A
JP2007266231A
Foreign References:
US20130134877
Attorney, Agent or Firm:
渡辺 望稔
三和 晴子
伊東 秀明
三橋 史生