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Patent Searching and Data


Title:
タングステン膜の成膜方法および成膜装置
Document Type and Number:
Japanese Patent JP6554418
Kind Code:
B2
Inventors:
堀田 隼史
饗場 康
Application Number:
JP2015550908A
Publication Date:
July 31, 2019
Filing Date:
November 21, 2014
Export Citation:
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Assignee:
東京エレクトロン株式会社
International Classes:
C23C16/14; H01L21/28; H01L21/285
Domestic Patent References:
JP4294530A
JP2011157571A
JP2001525491A
JP2007046134A
JP2009024252A
Foreign References:
Attorney, Agent or Firm:
高山 宏志