Title:
ペリクル接着剤除去装置及びペリクル接着剤除去方法
Document Type and Number:
Japanese Patent JP6554864
Kind Code:
B2
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| WO/2006/098266 | MASK CLEANING METHOD |
Inventors:
Hiroyuki Inomata
Yoichi Miura
Toshiaki Ibaraki
Ikuo Kikuchi
Ikeuchi Yuzu
Yoichi Miura
Toshiaki Ibaraki
Ikuo Kikuchi
Ikeuchi Yuzu
Application Number:
JP2015068738A
Publication Date:
August 07, 2019
Filing Date:
March 30, 2015
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
G03F1/82; G03F1/64
Domestic Patent References:
| JP8213309A | ||||
| JP11260784A | ||||
| JP58182826A | ||||
| JP2013172019A |
Foreign References:
| WO2010026938A1 | ||||
| WO2006111193A1 |
Attorney, Agent or Firm:
Hiromi Fujimasu
Keiko Fukamachi
Hideo Ito
Naoki Goto
Yusuke Ito
Hideyuki Tateishi
Keiko Fukamachi
Hideo Ito
Naoki Goto
Yusuke Ito
Hideyuki Tateishi