Title:
表面処理方法及び表面処理装置
Document Type and Number:
Japanese Patent JP6558649
Kind Code:
B2
Abstract:
The present invention relates to a surface treatment method and a surface treatment apparatus. The surface treatment method of the present invention is a process in which a plurality of processing regions are set on a treated surface of a target object composed of a valve metal, and each treatment region is continuously or intermittently immersed in an electrolytic solution for anodizing treatment. Thereby, an oxide film is formed on the surface to be processed. The anodizing treatment includes a step M (M is an integer of 2 or more). The Mth step includes the Ma step, the Mb step, and the Mnstep (n is an integer of 1 or more). The voltage V is sequentially increased in the direction of the highest voltage V to be a predetermined numerical value, and the Mth step is repeated to form the oxide film having a desired thickness.
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Inventors:
Fumiaki Ishigure
Inayoshi Sakae
Katsuhiro Fujita
Hiroshi Sato
Inayoshi Sakae
Katsuhiro Fujita
Hiroshi Sato
Application Number:
JP2017160602A
Publication Date:
August 14, 2019
Filing Date:
August 23, 2017
Export Citation:
Assignee:
ULVAC, Inc.
ULVAC Techno Co., Ltd.
ULVAC Techno Co., Ltd.
International Classes:
C25D11/12; C25D11/00; C25D11/04
Domestic Patent References:
| JP2013060613A | ||||
| JP4299830A | ||||
| JP52079874A | ||||
| JP6146077A | ||||
| JP2014214342A | ||||
| JP2009102721A | ||||
| JP6336693A | ||||
| JP2005320623A |
Foreign References:
| US5441618 |
Attorney, Agent or Firm:
Shu Oikawa
Tomoo Katsumata
Ryo Tsuchiya
Tomoo Katsumata
Ryo Tsuchiya