Title:
レーザ処理装置
Document Type and Number:
Japanese Patent JP6564481
Kind Code:
B2
Inventors:
Takahiro Fuji
Ryo Shimizu
Ryo Shimizu
Application Number:
JP2018038704A
Publication Date:
August 21, 2019
Filing Date:
March 05, 2018
Export Citation:
Assignee:
Japan Steel Works, Ltd.
International Classes:
H01L21/268; H01L21/20; H01L21/677
Domestic Patent References:
| JP2004179653A | ||||
| JP2012054603A | ||||
| JP2006264939A |
Attorney, Agent or Firm:
Yuki Yokoi