Title:
パターン形成装置
Document Type and Number:
Japanese Patent JP6566102
Kind Code:
B2
Inventors:
Tomoyuki Watanabe
Yoshiaki Kitou
Masaki Kato
Yoshiaki Kitou
Masaki Kato
Application Number:
JP2018170195A
Publication Date:
August 28, 2019
Filing Date:
September 12, 2018
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/24; G03F9/00; H01L21/677; H01L21/68
Domestic Patent References:
| JP2013200463A | ||||
| JP2008250072A | ||||
| JP20112475A |
Foreign References:
| WO2013175882A1 | ||||
| WO2013065429A1 |
Attorney, Agent or Firm:
Takehiro Chiba
Toshiyuki Miyadera
Takayuki Chima
Yasuharu Nakasone
Shiro Sakai
Toru Sekiguchi
Toshiyuki Miyadera
Takayuki Chima
Yasuharu Nakasone
Shiro Sakai
Toru Sekiguchi