Title:
容器に成膜する装置
Document Type and Number:
Japanese Patent JP6566686
Kind Code:
B2
Inventors:
Kiyoshi Hirotani
Yasuhiro Okada
Yasuhiro Okada
Application Number:
JP2015070503A
Publication Date:
August 28, 2019
Filing Date:
March 31, 2015
Export Citation:
Assignee:
Mitsubishi Heavy Industries Machinery Systems Co., Ltd.
International Classes:
C23C16/50
Domestic Patent References:
| JP2008231468A | ||||
| JP2006253312A | ||||
| JP2008088472A |
Attorney, Agent or Firm:
Mitsuru Oba
Horikawa Miyuki
Yuko Otake
Yamashita Seiko
Horikawa Miyuki
Yuko Otake
Yamashita Seiko