Title:
排ガスの減圧除害装置
Document Type and Number:
Japanese Patent JP6570794
Kind Code:
B2
Abstract:
An apparatus for exhaust gas abatement under reduced pressure includes a reaction tube having, in an interior thereof, an exhaust gas treatment space in which an exhaust gas supplied from an exhaust gas source via a vacuum pump is heated by an electric heater or excited by a plasma for decomposition and/or reaction treatment. The apparatus also includes a downstream vacuum pump connected to an exhaust gas outlet located downstream of the reaction tube to reduce a pressure in a region located downstream of an outlet of the vacuum pump and including the interior of the reaction tube. The downstream vacuum pump is a water-sealed pump. The apparatus further includes a water-washing unit for washing a downstream end of an exhaust gas flow path in the reaction tube with washing water. The washing water supplied by the water-washing unit is reused as seal water for the downstream vacuum pump.
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Inventors:
Maeda Masashi
Tetsuhisa Yoshida
Michihiko Yanagisawa
Tsutomu Tsukada
Satoshi Imamura
Tetsuhisa Yoshida
Michihiko Yanagisawa
Tsutomu Tsukada
Satoshi Imamura
Application Number:
JP2019519541A
Publication Date:
September 04, 2019
Filing Date:
May 02, 2018
Export Citation:
Assignee:
Kanken Techno Co., Ltd.
International Classes:
B01D53/46; B01D53/68; B01D53/76; F23G7/06; H01L21/02
Domestic Patent References:
| JP2000317265A | ||||
| JP2000323414A | ||||
| JP2010037631A | ||||
| JP2002263475A | ||||
| JP2004209373A |
Attorney, Agent or Firm:
Yoshiaki Mori
Maki Ichikawa
Maki Ichikawa