Title:
ヒータおよびこれを用いた半導体製造装置
Document Type and Number:
Japanese Patent JP6571550
Kind Code:
B2
Abstract:
A heater according to an embodiment of the present invention includes a heater element including a flat heat generating body, a linear slit formed in a linearly opened manner with one end arranged atan outer circumference of the heat generating body and the other end arranged in the turnover portion of the heat generating body, and a turnover portion formed in an opened manner to continue from the other end, an opening diameter of the turnover portion being larger than a slit width of the linear slit, the heater element generating heat by electrification; and a pair of electrodes connected toa predetermined face of the heater element, a voltage being applied on the electrodes during electrification of the heater element. The heater also includes a zigzag slit arranged in a manner that current flowing in the heat generating body from the electrodes is equally divided, with an opening being formed in a zigzag manner in the heat generating body.
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Inventors:
Hiroshi Furuya
Yusuke Sato
Kunihiko Suzuki
Yusuke Sato
Kunihiko Suzuki
Application Number:
JP2016016125A
Publication Date:
September 04, 2019
Filing Date:
January 29, 2016
Export Citation:
Assignee:
New Flare Technology Co., Ltd.
International Classes:
H05B3/74; C23C16/46; H01L21/205; H05B3/14; H05B3/22
Domestic Patent References:
| JP53144544U | ||||
| JP3019292U | ||||
| JP2015041447A | ||||
| JP10208855A | ||||
| JP11317284A | ||||
| JP7106261A |
Attorney, Agent or Firm:
Amagi International Patent Office