Title:
熱伝導性シート、熱伝導性シートの硬化物および半導体装置
Document Type and Number:
Japanese Patent JP6572643
Kind Code:
B2
Abstract:
A thermally conductive sheet includes a thermosetting resin and an inorganic filler material. When a pore diameter distribution is measured through mercury intrusion technique for the inorganic filler material, a pore diameter distribution curve of the inorganic filler material has a first maximum value in the range where the pore diameter R is greater than or equal to 0.1 μm and less than or equal to 5.0 μm, and a second maximum value in the range where the pore diameter R is greater than or equal to 10 μm and less than or equal to 30 μm, and the difference between a second pore diameter at the second maximum value and a first pore diameter at the first maximum value is greater than or equal to 9.9 μm and less than or equal to 25 μm.
Inventors:
Mochizuki Shunsuke
Kazuya Kitagawa
Yoji Shirato
Keita Nagahashi
Mika Tsuda
Noriya Hirasawa
Kurokawa Satomi
Kazuya Kitagawa
Yoji Shirato
Keita Nagahashi
Mika Tsuda
Noriya Hirasawa
Kurokawa Satomi
Application Number:
JP2015130020A
Publication Date:
September 11, 2019
Filing Date:
June 29, 2015
Export Citation:
Assignee:
Sumitomo Bakelite Co., Ltd.
International Classes:
C08L101/00; C08K3/38; C08L63/00; C08L79/04; H01L23/36
Domestic Patent References:
| JP2010070582A | ||||
| JP2010157563A | ||||
| JP2011176024A | ||||
| JP2012017421A | ||||
| JP2012121793A | ||||
| JP2014040341A | ||||
| JP2014040533A |
Foreign References:
| WO2014136959A1 | ||||
| WO2013100172A1 |
Attorney, Agent or Firm:
Shinji Hayami