Title:
加工装置
Document Type and Number:
Japanese Patent JP6574125
Kind Code:
B2
Inventors:
Omachi Osamu
Application Number:
JP2015198570A
Publication Date:
September 11, 2019
Filing Date:
October 06, 2015
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B23K26/00; B23Q1/62; B23Q5/34; B23Q17/24
Domestic Patent References:
| JP2229451A | ||||
| JP2008110383A | ||||
| JP2015077622A | ||||
| JP11284277A | ||||
| JP2009125934A | ||||
| JP10189496A | ||||
| JP56155534A |
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki
Kojino Koji
Sachiko Okunuki
Kojino Koji