Title:
ＰＺＴ圧電体膜及びその形成方法並びにＰＺＴ圧電体膜形成用組成物
Document Type and Number:
Japanese Patent JP6579012
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a PZT piezoelectric body membrane which is superior in piezoelectric property and in which leak current density is low and dielectric breakdown voltage is high, and to provide a formation method thereof and a composition for the PZT piezoelectric body membrane formation.SOLUTION: As for a PZT piezoelectric body membrane 21 with perovskite structure, the piezoelectric body membrane 21 contains at least one kind of rare earth elements X of Nd, Pr, Sm, Eu, Gd, Dy or Er, the grain diameter size is not less than 1 μm, the number of crystal grains 22 the crystal orientation of which is different from that of the piezoelectric body membrane 21 is not more than 1 per membrane surface 672 μm, and Pb, Zr and Ti are contained so that the rate of rare earth elements X of Zr and Ti contained in the piezoelectric body membrane 21 to a metal atomic number 100 is 0.5≤rare earth element X≤3.SELECTED DRAWING: Figure 1
Inventors:
Toshihiro Doi
Nobuyuki Soyama
Nobuyuki Soyama
Application Number:
JP2016065025A
Publication Date:
September 25, 2019
Filing Date:
March 29, 2016
Export Citation:
Assignee:
Mitsubishi Materials Corporation
International Classes:
C04B35/491; H01L41/187; H01L41/43
Domestic Patent References:
| JP2010206150A | ||||
| JP2005150694A | ||||
| JP11071103A |
Other References:
SHANNIGRAHI S.R.ら,X-Ray,SEM and dielectirc studies of Gd-modified sol-gel-prepared lead zirconate-lead titanate solid solution,MATERIALS LETTERS,1999年,Vol.39,P.318-323
Attorney, Agent or Firm:
Masayoshi Suda
Akira Murasawa
Akira Murasawa