Title:
芳香族ビニル化合物が付加したノボラック樹脂を含むレジスト下層膜形成組成物
Document Type and Number:
Japanese Patent JP6583636
Kind Code:
B2
Abstract:
The aromatic ring-containing compound (A) is an aromatic amine compound or a phenolic hydroxy group-containing compound. The novolac resin is a resin produced by a reaction of the aromatic amine compound or the phenolic hydroxy group-containing compound with aldehyde or ketone.
Inventors:
Takafumi Endo
Keisuke Hashimoto
Nishimaki Hirokazu
Rikimaru Sakamoto
Keisuke Hashimoto
Nishimaki Hirokazu
Rikimaru Sakamoto
Application Number:
JP2016511520A
Publication Date:
October 02, 2019
Filing Date:
March 17, 2015
Export Citation:
Assignee:
Nissan Chemical Co., Ltd.
International Classes:
G03F7/11; C08G8/30; C08G12/40; G03F7/26; G03F7/40; H01L21/027
Domestic Patent References:
| JP2009229666A |
Foreign References:
| WO2007105776A1 | ||||
| WO2013146670A1 | ||||
| WO2013047516A1 |
Attorney, Agent or Firm:
Hanabusa Patent and Trademark Office