Title:
密封装置及び基板密封方法
Document Type and Number:
Japanese Patent JP6584748
Kind Code:
B2
Abstract:
The sealing apparatus includes a measuring unit moving above a sealing unit to measure a pattern of the sealing unit, a laser beam irradiation device moving along the measuring unit to irradiate a laser beam onto the sealing unit, and a control unit controlling a moving path and a size of a focusing area of the laser beam irradiation device according to the pattern of the sealing unit that is measured in the measuring unit.
Inventors:
Korean government
Application Number:
JP2014103528A
Publication Date:
October 02, 2019
Filing Date:
May 19, 2014
Export Citation:
Assignee:
Samsung Display Co.,Ltd.
International Classes:
H05B33/04; H01L51/50; H05B33/10
Domestic Patent References:
| JP2009082966A | ||||
| JP2010145540A | ||||
| JP2009104841A | ||||
| JP2008527657A | ||||
| JP2011151007A | ||||
| JP2008073782A | ||||
| JP2211991A |
Foreign References:
| KR1020100069609A | ||||
| US20110177746 | ||||
| KR1020090033817A | ||||
| WO2008001808A1 | ||||
| KR1020090030254A |
Attorney, Agent or Firm:
Patent business corporation port
Nobuyuki Matsunaga
Tetsuji Tsuji
Nobuyuki Matsunaga
Tetsuji Tsuji