Title:
基板をマスキングするためのマスク構成、及び、マスクと基板との位置を合わせるための方法
Document Type and Number:
Japanese Patent JP6586530
Kind Code:
B2
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Inventors:
Hinterschuster, liner
Application Number:
JP2018538843A
Publication Date:
October 02, 2019
Filing Date:
January 28, 2016
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
C23C14/50; C23C14/04
Domestic Patent References:
| JP9120592A | ||||
| JP201488606A | ||||
| JP2016865A | ||||
| JP6299782A | ||||
| JP10317139A |
Attorney, Agent or Firm:
Sonoda/Kobayashi Patent Business Corporation